Project Description

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Motion control actuators, stages, slides, motors, controllers and more for precision positioning in the semiconductor manufacturing space.

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INSPECTION, PRODUCTION, AND TRANSFERS FOR SEMICONDUCTOR MANUFACTURING

From wafer processing through inspection and metrology to wafer packaging, our high precision motion products have solved many customer challenges in the semiconductor market. The Aerotech and Micronix platform of high precision products have been key to providing the semiconductor industry with solutions which are clean, reliable, and most importantly – they enable higher throughput through greater positioning precision. For foup transfer applications and others within the fab that do not require sub-micron motion, we have our general line of automation products perfect for more general automation and motion control.

HOW CAN WE HELP WITH YOUR SEMICONDUCTOR MANUFACTURING & AUTOMATION NEEDS?

With Controls:

  • Advanced features to help meet error budgets
  • Software utilities unlock new levels of precision & throughput
  • Powerful hardware to improve system bandwidth & control
  • Servo control and system bandwidth enhancements
  • Advanced motion control features improve system bandwidth and speed
  • Innovative positioning algorithms to step and settle faster
  • Step and settle time improvements
  • Force Control
    • Effortlessly switch between force and position control loops for high-resolution force control ideal for attach processes
  • Friction Compensation
    • Advanced algorithms to remove errors attributed to friction, allowing you to quickly step and settle to the smallest of distances

With Motors & Precision Positioning Stages:

  • Linear motors with the highest copper density for maximum force output
  • High resolution and fidelity force and velocity control
  • Accuracy Calibration
    • Easily build calibration files for single axis or multi-axis configurations based on known errors in the system
  • Utilize feedback devices that communicate directly with our position-based laser triggering hardware
  • Low to ultra-high vacuum positioning systems

SUCCESSES

APPLICATION AREAS
Motion Control & Automation for:
  • Thin Film Measurement
  • Optical Wafer Inspection (Defect Inspection, Metrology, Defect Review, Critical Dimension)
  • Electron/Ion Beam Inspection
  • Microscopy (Scanning Electron Microscopy (SEM), Atomic Force Microscopy (AFM))
  • Reticle/Mask Inspection
KEY APPLICATION NEEDS
  • Low precision foup transport automation
  • High precision positioning
  • High speed motion
  • Smooth velocity stability with no jitter
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Aerotech Semiconductor Applications

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Automation in the Semiconductor Market
Semiconductor Automation
Automation in Semiconductor Manufacturing